复旦大学：《材料物理——材料力学 Mechanics of materials》教学课件_第十一章 材料力学在微结构中的应用——柔性薄膜材料

材料力学在微结构中的应用: 柔性薄膜材料 CUEUELEL 梅永丰 复旦大学 yfm@fudan.edu.cn

材料力学在微结构中的应用 : 柔性薄膜材料 梅永丰 复旦大学 yfm@fudan.edu.cn

Shaping and transfer of nanomembranes ature Photon. 6, 615 (2012) Rolled-up nanotech Spring loaded. when a hlm to curl and roll. Transferrable laser Silicon nanomembrane NEWSFOCUS Science 313, 164 (2006) Flexible electronics 100μm nature ature Mater. 5, 388(2006) Science31l,208(2006) Nature454,748-753(2008)

Shaping and transfer of nanomembranes Nature Mater. 5, 388 (2006) Silicon nanomembrane Science 313, 164 (2006) Rolled-up nanotech Science 311, 208 (2006) Flexible electronics Nature 454, 748-753 (2008) Transferrable laser Nature Photon. 6, 615 (2012) 2

In case of silicon and germanium Thin and Flexible v Transferable V Processable Stackable(Homo /Hetero-junction) F. Cavallo M.G. Lagally, Soft Matter, 6, 439(2010) v Strain engineered into 3D structures v Shaped into wires or Ge ribbons polyimide 5mm w.S. Ho et al., Appl. Phys. Lett., 94, 261107(2009)

Si F. Cavallo & M. G. Lagally, Soft Matter, 6, 439 (2010) W. S. Ho et al., Appl. Phys. Lett., 94, 261107 (2009)  Thin and Flexible  Transferable  Processable  Stackable (Homo- /Hetero-junction)  Strain engineered into 3D structures  Shaped into wires or ribbons In case of silicon and germanium 3

Mechanics 101 nM Bulk 10 10 ≥10 10 G10-11 10 D0 810-14 10 10-17 10 101102103104105 Thickness(nm) oi:10.1038/ nature10381 Synthesis, assembly and applications of semiconductor nanomembranes J.A. Rogers, M G Lagally?&RGNuzzo Nature47745(2011)

Nature 477, 45 (2011) 5

Thinning and shaping of nanomembranes I Nanomembrar Flexible. transferable Bulk Substrate Shapi 乏 New property and application G.S. Huang, Y.F. Mei, Adv Mater. 24, 2517-2546(2012)

Thinning and shaping of nanomembranes New property and application G. S. Huang, Y. F. Mei, Adv. Mater. 24, 2517-2546 (2012) Flexible, Transferable… 6

Stretch A B

A B Stretch

Stretchable gmr nanomembranes Co Cu C Si substrate -e Si tic subst b) c10 -0.20.10.00.102 Y-F Chen et al. Advanced Materials. 20, 3224 (2008)

Stretchable GMR nanomembranes Y.-F. Chen et al. Advanced Materials. 20, 3224 (2008)

Stretch graphene aser Graphene E PMMA SiO LSMO/PMN-PT F Ding et al., Nano Letters 10, 3453( 2010)

Stretch graphene F. Ding et al., Nano Letters 10, 3453 (2010)

detach A B

A B detach