《Microelectronics Process》lecture15

Alternative MicroFabrication and Applications in Medicine and Biology Massachusetts Institute of Technology 6.152-Lecture 15 Fa|2003 These slides prepared by Dr. Hang Lu MIT BioMEMS. Fall 2003

Alternative MicroFabrication and Applications in Medicine and Biology Massachusetts Institute of Technology 6.152 - Lecture 15 Fall 2003 These slides prepared by Dr. Hang Lu MIT BioMEMS, Fall 2003

Outline of Today's Materials Intro Alternative materials and fabrication techniques Applications in biology and chemistry Applications in medicine A real MTL example of rapid prototyping MIT BioMEMs. Fall 2003

Outline of Today’s Materials • Intro • Alternative materials and fabrication techniques • Applications in biology and chemistry • Applications in medicine • A real MTL example of rapid prototyping MIT BioMEMS, Fall 2003

Micro Systems for Bio /Med Micro systems have characteristic length scale in the order of microns. Human hair width is-100 microns. The applications of these systems span Biological analysis Medical diagnosis Chemical analysis and synthesis Drug discovery Drug Delivery 重重 MIT BioMEMS. Fall 2003

Micro Systems for Bio / Med • Micro systems have characteristic length scale in the order of microns. (Human hair width is ~100 microns.) • The applications of these systems span – Biological analysis – Medical diagnosis – Chemical analysis and synthesis – Drug discovery – Drug Delivery – … MIT BioMEMS, Fall 2003

Advantages of Micro Systems Small length scale Laminar flow good and bad High surface-to-volume ratio Small thermal mass Close to some biological length scale Shorter processing time Less sample /reagent required Disposable Automation possible Parallel operation possible-high throughput Integration possible Whitesides(harvard U. Photo credit: Felice Frankel y MIT BioMEMS. Fall 2003

Immunoassay chip (Aclara) Advantages of Micro Systems • Small length scale • Laminar flow (good and bad) • High surface-to-volume ratio • Small thermal mass • Close to some biological length scale • Shorter processing time • Less sample / reagent required • Disposable • Automation possible • Parallel operation possible – high throughput • Integration possible Whitesides (Harvard U.); Photo credit: Felice Frankel MIT BioMEMS, Fall 2003

Alternative materials Materials requirement for bioMEMS is different from that for mems Desired properties of bioMEMS materials Biocompatible Chemically modifiable Easy to fabricate Economic Soft and compliable Smart If not Si and glass, what then? Polymers( e.g. PDMS, PMMA) are good materials especially for biological applications MIT BioMEMS. Fall 2003

Alternative Materials • Materials requirement for bioMEMS is different from that for MEMS. • Desired properties of bioMEMS materials – Biocompatible – Chemically modifiable – Easy to fabricate – Economic – Soft and compliable – Smart • If not Si and glass, what then? • Polymers (e.g. PDMS, PMMA) are good materials especially for biological applications. MIT BioMEMS, Fall 2003

Alternative Fabrication methods Soft lithography Micro molding in capillaries Micro contact printing (MIMC Long chain thiol PDMS Auar Ag PDMS 20-200m SAMs 23n Replica molding Y Xia and g m Whitesides( harvard U) PU MIT BioMEMS. Fall 2003

Alternative Fabrication Methods • Soft lithography Micro molding in capillaries Replica Molding Micro contact printing (MIMC) Y. Xia and G.M. Whitesides (Harvard U.) MIT BioMEMS, Fall 2003

Other Polymer Methods Hot embossing Injection molding Stamp(master) Heat and pressure Thermoplastic Substrate MIT BioMEMS. Fall 2003

Other Polymer Methods • Hot embossing Hot embossing • Injection molding Stamp (master) Heat and pressure Thermoplastic Substrate MIT BioMEMS, Fall 2003

Examples of bioMEMs Systems Detection and diagnosis Synthesis and analysis Interaction and interrogation · Treatment MIT BioMEMs. Fall 2003

Lab-on-a-chip (Caliper) Examples of bioMEMS Systems • Detection and diagnosis • Synthesis and analysis • Interaction and interrogation • Treatment MIT BioMEMS, Fall 2003

DNA electrophoresis丨 A95c· me te B 7/C extension C 60C. amano CR chip (A Manz, Imperial College) Etched glass Continuous Three t zones Thermal insulation MIT BioMEMs. Fall 2003

DNA electrophoresis I PCR chip (A. Manz, Imperial College) • Etched glass • Continuous • Three T zones • Thermal insulation MIT BioMEMS, Fall 2003

DNA electrophoresis lI Electrode insertion scheme matching hig throughput need ◎ ◎ Pt Electrode TTTTTTTT 中 二二3 Elastomer Reservoir Array CAE micro-plate 2222 Mathies( Berkeley) High throughput Etched glass MIT BioMEMs. Fall 2003

DNA electrophoresis II • Electrode insertion scheme matching high throughput need Mathies (Berkeley) • High throughput • Etched glass MIT BioMEMS, Fall 2003