《Microelectronics Process》Massachusetts Institute of Technology

Massachusetts Institute of Technology 3.155J/6.152J Microelectronics Processing technology Fall term 2003 Instructions for the IC lab report Your lab report should follow the format of the IEEE Electron Device Letters. Contents: Your Letter should include the following sections Title y-line(Author, affiliation, and submission date) Abstract (50-200 words) Introduction Experiment Results and discussion Conclusion References Although Letters do not usually have appendices, you should attach the following two appendices the professors can better evaluate your work Appendix B: Calculations See the lecture slides How to Write an IEEE Letter" for details about what should appear in each section and appendix Length: If you like, you may download a Word or LaTeX template from the IEEE website. If you use a template, your letter must be no more than three pages long, not including appendices If you don't use a template, your letter must satisfy the following equation, for which fis the number of figures and n is the number of words in the paper, not including appendices n+200f<2750 There is no page limit on the appendices, but the letter must be written in such a way that it stands alone without requiring reference to the appendices Limiting the Letters length will be challenging. Use the following to focus your writing Purpose: The purpose of your paper is to evaluate the effectiveness of your fabrication rocess. You will use MOs C-V data to achieve this purpose. Audience: You may assume that your audience is familiar with microelectronics Grading: For Lab 1, you will receive writing feedback on your Letter and a technical grade based on your Letter and Appendices. The technical grade will be based on your critical evaluation of the electrical and material property data, and your success in using these measurements to characterize the process Deadline: E-mail your letter by 5pm Friday Oct 3 (Send LaTeX files as PDFs. Either include your appendices, or bring one hard copy of your appendices to class on Monday oct 6

Massachusetts Institute of Technology 3.155J/6.152J Microelectronics Processing Technology Fall Term 2003 Instructions for the IC Lab Report Your lab report should follow the format of the IEEE Electron Device Letters. Contents: Your Letter should include the following sections: Title By-line (Author, affiliation, and submission date) Abstract (50–200 words) Introduction Experiment Results and Discussion Conclusion References Although Letters do not usually have appendices, you should attach the following two appendices so the professors can better evaluate your work: Appendix A: Data Appendix B: Calculations See the lecture slides “How to Write an IEEE Letter” for details about what should appear in each section and appendix. Length: If you like, you may download a Word or LaTeX template from the IEEE website. If you use a template, your letter must be no more than three pages long, not including appendices. If you don’t use a template, your letter must satisfy the following equation, for which f is the number of figures and n is the number of words in the paper, not including appendices: n + 200f < 2750 There is no page limit on the appendices, but the Letter must be written in such a way that it stands alone without requiring reference to the appendices. Limiting the Letter’s length will be challenging. Use the following to focus your writing: Purpose: The purpose of your paper is to evaluate the effectiveness of your fabrication process. You will use MOS C-V data to achieve this purpose. Audience: You may assume that your audience is familiar with microelectronics. Grading: For Lab 1, you will receive writing feedback on your Letter and a technical grade based on your Letter and Appendices. The technical grade will be based on your critical evaluation of the electrical and material property data, and your success in using these measurements to characterize the process. Deadline: E-mail your letter by 5pm Friday Oct 3. (Send LaTeX files as PDFs.) Either include your appendices, or bring one hard copy of your appendices to class on Monday Oct 6