《工业等离子体原理》课程PPT教学课件（英文版）Chapter 01 Principles and Applications of Industrial Plasma - Introduction

Principles and Applications of Industrial plasma

Principles and Applications of Industrial Plasma

Contents 1 Introduction 1.1 The social role of industrial plasma engineering 1.2 Important definitions 1.3 Plasma physics regimes and issues 2 Kinetic Theory of Gases 2. 1 measurement of high vacuum 2.2 particle distribution functions 2. 3 particle collisions a 3 Motion of charges in Electric and magnetic Fⅰelds 3. 1 Charged particle motion in electric fields 3.2 Charged particle motion in magnetic fields 3.3 Charged particle motion in steady electric and magnetic fields

Contents n 1 Introduction 1.1 The social role of industrial plasma engineering 1.2 Important definitions 1.3 Plasma physics regimes and issues n 2 Kinetic Theory of Gases 2.1 measurement of high vacuum 2.2 particle distribution functions 2.3 particle collisions n 3 Motion of Charges in Electric and Magnetic Fields 3.1 Charged particle motion in electric fields 3.2 Charged particle motion in magnetic fields 3.3 Charged particle motion in steady electric and magnetic fields

4 Characteristics of plasma 4.1 Bulk properties of plasma 4.2 Quasi-neutrality of plasma 4.3 Electrostatic Boltzmann equation 4.4 Simple electrostatic plasma sheaths 4.5 Plasma frequency 5 Electron sources and beams 5. 1 Thermionic emission sources 5.2 Photoelectric emission sources 5.3 Field emission sources 5. 4 Hollow cathode sources 5.5 Secondary electron emission sources 5.6 Sources and beams characteristics 5.7 Charged particle beam transport

n 4 Characteristics of Plasma 4.1 Bulk properties of plasma 4.2 Quasi-neutrality of plasma 4.3 Electrostatic Boltzmann equation 4.4 Simple electrostatic plasma sheaths 4.5 Plasma frequency n 5 Electron Sources and Beams 5.1Thermionic emission sources 5.2 Photoelectric emission sources 5.3 Field emission sources 5.4 Hollow cathode sources 5.5 Secondary electron emission sources 5.6 Sources and beams characteristics 5.7 Charged particle beam transport

a6 lon sources and beams 7 Dark Electrical Discharges in Gases 7. 1 Background ionization 7. 2 Saturation regime 7.3 Townsend discharge 7.4 Corona discharges 75 Corona sources 7.6 Electrical breakdown

n 6 Ion Sources and Beams n 7 Dark Electrical Discharges in Gases 7.1 Background ionization 7.2 Saturation regime 7.3 Townsend discharge 7.4 Corona discharges 7.5 Corona sources 7.6 Electrical breakdown

8 dC Electrical Arc Discharges in gases 8. 1 Arc regime 8.1.1 Voltage-Current Characteristic 8. pHenomenology of electrical arcs 8.2. 1 Classical Arc Nomenclature 8.3 Physical processes in electrical 8.3. 1 Body forces on arcs 8.3.2 Electrode jet formation

8 DC Electrical Arc Discharges in Gases 8.1 Arc regime 8.1.1 Voltage-Current Characteristic 8.2Phenomenology of electrical arcs 8.2.1 Classical Arc Nomenclature 8.3 Physical processes in electrical 8.3.1 Body forces on arcs 8.3.2 Electrode Jet Formation

a 9 Inductive RF Electrical Discharges in gases 9.1 Introduction 9.2 Phenomenology of RF-plasma interactions 9.3 Skin depth of plasma 9.4 Inductive plasma torch 9. 5 Other methods of generating inductive plasmas

n 9 Inductive RF Electrical Discharges in Gases 9.1 Introduction 9.2 Phenomenology of RF-plasma Interactions 9.3 Skin depth of plasma 9.4 Inductive plasma torch 9.5 Other methods of generating inductive plasmas

Chapter 1 Introduction 1.1 The social role of industrial plasma engineering The plasma engineering have an important role to promote the society development and increase the living standard of the human beings due to it May resolve the problem of the energy sources for the society development May have very high efficiency and effectiveness of energy consumposition May accomplish industrial processing without unwanted byproducts or waste materials

Chapter 1 Introduction 1.1 The social role of industrial plasma engineering The plasma engineering have an important role to promote the society development and increase the living standard of the human beings due to it: May resolve the problem of the energy sources for the society development May have very high efficiency and effectiveness of energy consumposition May accomplish industrial processing without unwanted byproducts or waste materials

Discussed in details First, Plasmas offer two primary characteristics of industrial interest: (1) higher temperatures and energy densities than that achieved by chemical or other means; 2 )energetic actives species ultraviolet or visible photons; charged particles, including electrons, ions, and free radicals; and highly reactive neutral species, such as reactive atoms(O, F, etc), excited atomic states and reactive molecular fragments such as monomers

Discussed in details: First, Plasmas offer two primary characteristics of industrial interest :(1) higher temperatures and energy densities than that achieved by chemical or other means;(2) energetic actives species: ultraviolet or visible photons; charged particles, including electrons, ions, and free radicals; and highly reactive neutral species, such as reactive atoms (O,F, etc) ,excited atomic states, and reactive molecular fragments such as monomers

and as a result. Plasmas offer benefits over other industrial processing method such more efficiently and cheaply, without producing large volumes of unwanted byproducts or waste materials, with minimal pollution or production of toxic wastes

and as a result, Plasmas offer benefits over other industrial processing method, such more efficiently and cheaply, without producing large volumes of unwanted byproducts or waste materials, with minimal pollution or production of toxic wastes

Some applications listed below 1. More efficient energy utilization a)plasma lighting devices b)Plasma chemistry c)Materials processing with thermal plasma 2. Accomplishing unique results a)Electron, ion, and plasma sources b)New materials from plasma chemistry c)Plasma etching and deposition for microelectronics d)Materials processing with thermal plasma e)Communications using geophysical plasmas f space propulsion systems g)surface modification of materials

Some applications listed below: 1. More efficient energy utilization a) Plasma lighting devices b) Plasma chemistry c) Materials processing with thermal plasma 2. Accomplishing unique results a) Electron, ion, and plasma sources b) New materials from plasma chemistry c) Plasma etching and deposition for microelectronics d) Materials processing with thermal plasma e) Communications using geophysical plasmas f) Space propulsion systems g) surface modification of materials