《DAW Technology and Its Applications》

I SAW Technology 母 and Its Applications Prof. Shi Wenkang Shanghai Jiao Tong University PR CHINA [896

Prof. Shi Wenkang SAW Technology and Its Applications Shanghai Jiao Tong University P.R.CHINA

Outline Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on sTu

Outline Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on SJTU

Concent What iS saw? SAW----Surface Acoustic Wave 10 203 00 10 20 100

What is SAW ? SAW----Surface Acoustic Wave Concept

Concept: What is SAW? o Mechanical Wave AT o propagate in the surface Energy Concentrated in the thin layer (<1X) MATAO Different Modes RSAWLSAWLLSAW, SH-SAW Love Wave LAMB Wave moT O Much lower velocity than Electromagnetic Wave's (1: 105)

Concept: What is SAW? ⚫ Mechanical Wave ⚫ propagate in the surface Energy Concentrated in the thin layer (<1λ) ⚫ Different Modes: RSAW,LSAW,LLSAW, SH-SAW, Love Wave, LAMB Wave…. ⚫ Much lower velocity than Electromagnetic Wave’s (1: 105 )

Concept: Physical Principal Mm Based on 1. Piezoelectric effect and converse piezoelectric effect Mechanical Electrical 3x+> 2. Wave reflected at discontinuity media

Concept: Physical Principal Based on: 1. Piezoelectric effect and Converse Piezoelectric effect Mechanical Electrical 2. Wave reflected at discontinuity media

Concent: Historical Review &t 1885 Discovery by British Physicist Releigh In Research on seismic Wave 1949 Bell Lab Discovery LiNbO3 1965 Exciting SAW artificially by American Scientist R. M.White and Voltmer Using Interdigital Transducer(IDT) Since1970’s 29X( Wide Applications in Telecommunication, Radiobroadcast. TVet R71 Since 1980s SAW Sensor Development

Concept: Historical Review 1885 Discovery by British Physicist Releigh In Research on seismic Wave 1949 Bell Lab Discovery LiNbO3 1965 Exciting SAW artificially by American Scientist R.M.White and Voltmer Using Interdigital Transducer(IDT) Since 1970’s Wide Applications in Telecommunication, Radiobroadcast, TV etc. Since 1980’s SAW Sensor Development

Concept: Advantages ● High sensitivit ● High accuracy ● Passive ● Wireless ● Digitalized o Mass production o Many Application-Possibilities

Concept: Advantages ⚫ High Sensitivity ⚫ High Accuracy ⚫ Passive ⚫ Wireless ⚫ Digitalized ⚫ Mass Production ⚫ Many Application-Possibilities

Outline Concept Materials Mathematic model Type of SAW Device Typical Applications Development Tendency Research on sTu

Outline Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on SJTU

Materals PiezoMaterials Quartz LiNbo3 LiTaO3 LGS The Properties SAW related 1. Mechanical-Electronic Coupling Coefficient 2. Temperature Related Factor (TCF 3. Dielectric Factor 4 Phase Velocity 5. Yang's Model 6. Density 7. Insertion Loss 8, Elastic Coefficient Different materials. Different Cut Orientation has different 2y properties, SO Optimum, Compromise Design be Needed

Materials Piezo-Materials: Quartz LiNbO3 LiTaO3 LGS The Properties SAW related: 1. Mechanical-Electronic Coupling Coefficient. 2. Temperature Related Factor ( TCF ) 3. Dielectric Factor 4. Phase Velocity 5. Yang’s Model 6. Density 7. Insertion Loss 8. Elastic Coefficient Different Materials, Different Cut Orientation has different properties, so Optimum,Compromise Design be Needed

Outline Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on sTu

Outline Concept Materials Mathematic Model Type of SAW Device Typical Applications Development Tendency Research on SJTU