上海交通大学：《现代材料科学实验方法前沿》课程教学资源_多尺度关联的组织结构表征方法 Correlative multi-scale characterization（1/2）INTRODUCTION TO ANALYTICAL ELECTRON MICROSCOPY

国 《现代材料科学实验方法前沿》 OM PPMS XRD STM XRF AFM SEM sample Raman EPMA DSC TEM ICP XPS AES 材料科学与工程学院 1 School of Materials Science and Engineering

材料科学与工程学院 School of Materials Science and Engineering 《现代材料科学实验方法前沿》 1 OM XRD XRF SEM EPMA TEM XPS AES ICP DSC Raman AFM STM PPMS sample

读书报告要求和评分依据 结合讲课内容，就某个实验方法， 就其原 理、适用范围、典型应用案例等写出自己 的分析 而不是某个材料研究的综述 以课程当前群体完成质量的相对高低进行 评分 材料科学与工程学院 3 School of Materials Science and Engineering

材料科学与工程学院 School of Materials Science and Engineering 读书报告要求和评分依据 • 结合讲课内容，就某个实验方法，就其原 理、适用范围、典型应用案例等写出自己 的分析 • 而不是某个材料研究的综述 • 以课程当前群体完成质量的相对高低进行 评分 3

⑧ 参考提纲 ·摘要 ·分析需求（必要性) 方法的原理（必要的推导） 适用对象和应用案例（典型案例，结合自 己的研究工作) 。 总结 ·参考文献 材料科学与工程学院 4 School of Materials Science and Engineering

材料科学与工程学院 School of Materials Science and Engineering 参考提纲 • 摘要 • 分析需求（必要性） • 方法的原理（必要的推导） • 适用对象和应用案例（典型案例，结合自 己的研究工作） • 总结 • 参考文献 4

上游充通大学 SHANGHAI JIAO TONG UNIVERSITY 1896 1935 987 2006 《现代材料科学实验方法前沿》博士生课程（C050717) 多尺度关联的组织结构表征方法 (Correlative multi-scale characterization) 张澜庭 材料科学与工程学院 2019年3月5日 lantingzh@sjtu.edu.cn

材料科学与工程学院 School of Materials Science and Engineering 1896 1935 1987 2006 多尺度关联的组织结构表征方法 (Correlative multi-scale characterization) 张澜庭 材料科学与工程学院 2019年3月5日 lantingzh@sjtu.edu.cn 《现代材料科学实验方法前沿》博士生课程（C050717）

图 Outline A brief introduction to analytical electron microscopy(courtesy Prof.Shipu Chen) Example of correlative multi-scale characterization(多尺度关联的组织结构表 征方法) 材料科学与工程学院 6 School of Materials Science and Engineering

材料科学与工程学院 School of Materials Science and Engineering Outline • A brief introduction to analytical electron microscopy (courtesy Prof. Shipu Chen) • Example of correlative multi-scale characterization (多尺度关联的组织结构表 征方法) 6

⑧ Part 1 INTRODUCTION TO ANALYTICAL ELECTRON MICROSCOPY 材料科学与工程学院 School of Materials Science and Engineering

材料科学与工程学院 School of Materials Science and Engineering INTRODUCTION TO ANALYTICAL ELECTRON MICROSCOPY Part 1

Jeol2010F Robert Hooke(1635-1703) 于17世纪晚期设计的显微 镜 g A 1938 0.138nm Vaccinia virus

8 Jeol2010F Vaccinia virus

Materials Characterization ATETRAHEDRONOF MATERIALS ENGINEERING Properties=Products &Applications Microstructure -Characterization Composition Preparation Processing Thermal,mechanical,... R D-Quality Control -Failure Analysis

Materials Characterization A “TETRAHEDRON” OF MATERIALS ENGINEERING Properties  Products &Applications Microstructure – Characterization Composition - Preparation Processing – Thermal, mechanical, … ------------------------------------ R & D – Quality Control – Failure Analysis

Theoret Limit of Resolution for a Microscope Resolution or Resolving Power Rayleigh Criterion d=0.61元/n sin a .Optica/Microscope-micron or submicron Amin =400 nm (purple),nmax1.5 (oil), amax≈75°，d≈0.2um .M do Effective Magnification of OM Naked eye:D 0.2 mm Mer=D/d=0.2mm/0.2μm=1,000X

Theoret. Limit of Resolution for a Microscope • Resolution or Resolving Power Rayleigh Criterion d0 = 0.61  / n sin  • Optical Microscope – micron or submicron min = 400 nm (purple), nmax  1.5 (oil), max  75º, d0  0.2 m • Effective Magnification of OM Naked eye: D = 0.2 mm Meff = D / d0 = 0.2 mm / 0.2 m = 1,000 X d0 M d0

Metallography in a Broadened Sense -Materialography- .Conventional Materials Microcharacterization Morphology+Composition+Structure+(Property) By OM /Chemical analysis XRD /(e.g.Microhardness) Aiming to:High spatial resolution In-situ characterization Only being met by Electron Microscopy 1932 E.Ruska M.Knoll -TEM Transmission EM) 1938 M.von Ardenne-SEM /Scanning EM 1951 R.Castaing EPMA (Electron Probe X-ray Microanalyzer 1986 E.Ruska-Nobel (Physics)Prize

Metallography in a Broadened Sense - Materialography - • Conventional Materials Microcharacterization - Morphology+Composition+Structure+(Property) By OM / Chemical analysis / XRD / (e.g. Microhardness) - Aiming to: High spatial resolution + In-situ characterization • Only being met by Electron Microscopy - 1932 E. Ruska & M. Knoll – TEM (Transmission EM) - 1938 M. von Ardenne – SEM (Scanning EM) - 1951 R. Castaing – EPMA (Electron Probe X-ray Microanalyzer) - 1986 E. Ruska - Nobel (Physics) Prize