《微机技术与仪器系统设计》课程教学资源（芯片手册）ADXL330-加速度传感器

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soiseek com ANALOG Small,Low Power,3-Axis +3g DEVICES /MEMS®Accelerometer ADXL330 FEATURES GENERAL DESCRIPTION The ADXL330 is a small,thin,low powe complete three axis 4mm x4mm x1.45 mm LFCSP accelero on 10,000g shock survival Wadin temp The user selects the bandwidth of the accelerometer using the xis Cx,Cv,and Ccapacitors at the Xour,Yo,and Zou RoHS/WEEE lead-free compliant acitor per Bandw APPLICATIONS 0.5 Hz to 550 Hz for the Zaxis. ,motion-andnng (LFCSP LO). rame chip scale package Mobile devices ion Sports and health devices FUNCTIONAL BLOCK DIAGRAM DXL330 UTPUT AM RFILT Figure

Small, Low Power, 3-Axis ±3 g iMEMS® Accelerometer ADXL330 Rev. 0 Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners. One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.461.3113 ©2006 Analog Devices, Inc. All rights reserved. FEATURES 3-axis sensing Small, low-profile package 4 mm × 4 mm × 1.45 mm LFCSP Low power 200 μA at VS = 2.0 V (typical) Single-supply operation 2.0 V to 3.6 V 10,000 g shock survival Excellent temperature stability BW adjustment with a single capacitor per axis RoHS/WEEE lead-free compliant APPLICATIONS Cost-sensitive, low power, motion- and tilt-sensing applications Mobile devices Gaming systems Disk drive protection Image stabilization Sports and health devices GENERAL DESCRIPTION The ADXL330 is a small, thin, low power, complete three axis accelerometer with signal conditioned voltage outputs, all on a single monolithic IC. The product measures acceleration with a minimum full-scale range of ±3 g. It can measure the static acceleration of gravity in tilt-sensing applications, as well as dynamic acceleration resulting from motion, shock, or vibration. The user selects the bandwidth of the accelerometer using the CX, CY, and CZ capacitors at the XOUT, YOUT, and ZOUT pins. Bandwidths can be selected to suit the application, with a range of 0.5 Hz to 1,600 Hz for X and Y axes, and a range of 0.5 Hz to 550 Hz for the Z axis. The ADXL330 is available in a small, low-profile, 4 mm × 4 mm × 1.45 mm, 16-lead, plastic lead frame chip scale package (LFCSP_LQ). FUNCTIONAL BLOCK DIAGRAM 05677-001 3-AXIS SENSOR AC AMP DEMOD OUTPUT AMP OUTPUT AMP OUTPUT AMP VS COM ST XOUT YOUT ZOUT +3V CX CY CZ ADXL330 RFILT RFILT RFILT CDC Figure 1. soiseek.com

soiseek.com ADXL330 TABLE OF CONTENTS Features. Performance. 11 Applications. Applications. 12 General Description. Power Supply Decoupling. .12 Functional Block Diagram Setting the Bandwidth Using C 12 Revision History Self-Test 12 Design Trade-Offs for Selecting Filter Characteristics The Absolute Maximum Ratings Noise/BW Trade-Off. 12 Use with Operating Voltages Other than 3 V. .12 ESD Caution. Pin Configuration and Function Descriptions Axes of Acceleration Sensitivity 13 Typical Performance Characteristics Outline Dimensions. .14 .6 Theory ofOperation Ordering Guide .14 Mechanical Sensor. 11 REVISION HISTORY 3/06-Revision0:Initial Version Rev.0[Page 2of 16

ADXL330 Rev. 0 | Page 2 of 16 TABLE OF CONTENTS Features . 1 Applications. 1 General Description . 1 Functional Block Diagram . 1 Revision History . 2 Specifications. 3 Absolute Maximum Ratings. 4 ESD Caution. 4 Pin Configuration and Function Descriptions. 5 Typical Performance Characteristics . 6 Theory of Operation . 11 Mechanical Sensor. 11 Performance. 11 Applications. 12 Power Supply Decoupling . 12 Setting the Bandwidth Using CX, CY and CZ . 12 Self-Test . 12 Design Trade-Offs for Selecting Filter Characteristics: The Noise/BW Trade-Off. 12 Use with Operating Voltages Other than 3 V. 12 Axes of Acceleration Sensitivity . 13 Outline Dimensions . 14 Ordering Guide . 14 REVISION HISTORY 3/06—Revision 0: Initial Version soiseek.com

soiseek com ADXL330 SPECIFICATIONS Ta=25C,Vs =3 V.Cx=Cr=Cz =0.1 uF acceleration =0g,unless otherwise noted.All minimum and maximum specifications are guaranteed.Typical specifications are not guaranteed. Table 1. Conditions Min Typ Max Unit ach axis +36 %6 of full scale Package Alignment Error 1 Degrees gnment Error grees Each axis Sensitivity at Xout,Yout,Zo. 4=3V 270 300 330 ZERO BIAS LEVEL (RATIOMET t0015 g Voltage at Xou,You,Zou Vs=3V 12 15 1.8 ±1 389 160 Rat tole Sensor Resonan Frequency 32±15% 5 SELF-TEST ST Actuation Current +60 Output Change at Self-test oto1 60 mV OUTPUT AMPLIFIER Noioad > WER SUPPLY Operating Voltage Range 6 Supply Current %=3V A No external filter ms Operating Temperature Range -25 +70 mb 1.6 kHz.For C:=0.01 uF,band width-50 Hz.ForC.C.C10uF ately 160 x Cr or Cyor C+1 ms,where Cx Cr C:are in uF Rev.Page3 of 16

ADXL330 Rev. 0 | Page 3 of 16 SPECIFICATIONS TA = 25°C, VS = 3 V, CX = CY = CZ = 0.1 μF, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. Table 1. Parameter Conditions Min Typ Max Unit SENSOR INPUT Each axis Measurement Range ±3 ±3.6 g Nonlinearity % of full scale ±0.3 % Package Alignment Error ±1 Degrees Inter-Axis Alignment Error ±0.1 Degrees Cross Axis Sensitivity1 ±1 % SENSITIVITY (RATIOMETRIC)2 Each axis Sensitivity at XOUT, YOUT, ZOUT VS = 3 V 270 300 330 mV/g Sensitivity Change Due to Temperature3 VS = 3 V ±0.015 %/°C ZERO g BIAS LEVEL (RATIOMETRIC) Each axis 0 g Voltage at XOUT, YOUT, ZOUT VS = 3 V 1.2 1.5 1.8 V 0 g Offset vs. Temperature ±1 mg/°C NOISE PERFORMANCE Noise Density XOUT, YOUT 280 μg/√Hz rms Noise Density ZOUT 350 μg/√Hz rms FREQUENCY RESPONSE4 Bandwidth XOUT, YOUT5 No external filter 1600 Hz Bandwidth ZOUT5 No external filter 550 Hz RFILT Tolerance 32 ± 15% kΩ Sensor Resonant Frequency 5.5 kHz SELF-TEST6 Logic Input Low +0.6 V Logic Input High +2.4 V ST Actuation Current +60 μA Output Change at XOUT Self-test 0 to 1 −150 mV Output Change at YOUT Self-test 0 to 1 +150 mV Output Change at ZOUT Self-test 0 to 1 −60 mV OUTPUT AMPLIFIER Output Swing Low No load 0.1 V Output Swing High No load 2.8 V POWER SUPPLY Operating Voltage Range 2.0 3.6 V Supply Current VS = 3 V 320 μA Turn-On Time7 No external filter 1 ms TEMPERATURE Operating Temperature Range −25 +70 °C 1 Defined as coupling between any two axes. 2 Sensitivity is essentially ratiometric to VS. 3 Defined as the output change from ambient-to-maximum temperature or ambient-to-minimum temperature. 4 Actual frequency response controlled by user-supplied external filter capacitors (CX, CY, CZ). 5 Bandwidth with external capacitors = 1/(2 × π × 32 kΩ × C). For CX, CY = 0.003 μF, bandwidth = 1.6 kHz. For CZ = 0.01 μF, bandwidth = 500 Hz. For CX, CY, CZ = 10 μF, bandwidth = 0.5 Hz. 6 Self-test response changes cubically with VS. 7 Turn-on time is dependent on CX, CY, CZ and is approximately 160 × CX or CY or CZ + 1 ms, where CX, CY, CZ are in μF. soiseek.com

soiseek.com ADXL330 ABSOLUTE MAXIMUM RATINGS Stresses above those listed under Absolute Maximum Ratings Rating 10,000g may cause permanent damage to the device.This isa stress nice at these or any 009 on 470V (COM-03V)to(V;+03V) section of this specificat All Other Pins ndefinite T RAMP-D t25'C TO PEAK Fiaure 2.Recommended Soldering Profile Table 3.Recommended Soldering Profil Profile Feature 5n63/pb37 Pb-Free Average Ramp Rate (TtoT) 3℃/5max 3C/s max um Temperature (T) 00℃ 150 Maximum Temperature( 150r 200 60st0120s 60st0180s Ramp-Up Rate 3C/s max 3"C/s max Time Maintained Above Liquidous(T) 2 0sto1505 PeakTemperature（T 240rC+0rC-5℃ 260C+0C/-5℃ fActual Peak Temperature( s to 40 s Time 25C to Peak Temperature 6minutes max 8 minutes max ESD CAUTION WARNING! deghoooas ESD functionality. Rev.0|Page 4 of 16

ADXL330 Rev. 0 | Page 4 of 16 ABSOLUTE MAXIMUM RATINGS Table 2. Parameter Rating Acceleration (Any Axis, Unpowered) 10,000 g Acceleration (Any Axis, Powered) 10,000 g VS −0.3 V to +7.0 V All Other Pins (COM − 0.3 V) to (VS + 0.3 V) Output Short-Circuit Duration (Any Pin to Common) Indefinite Temperature Range (Powered) −55°C to +125°C Temperature Range (Storage) −65°C to +150°C Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. 05677-002 tP tL t25°C TO PEAK tS PREHEAT CRITICAL ZONE TL TO TP TEMPERATURE TIME RAMP-DOWN RAMP-UP TSMIN TSMAX TP TL Figure 2. Recommended Soldering Profile Table 3. Recommended Soldering Profile Profile Feature Sn63/Pb37 Pb-Free Average Ramp Rate (TL to TP) 3°C/s max 3°C/s max Preheat Minimum Temperature (TSMIN) 100°C 150°C Maximum Temperature (TSMAX) 150°C 200°C Time (TSMIN to TSMAX), tS 60 s to 120 s 60 s to 180 s TSMAX to TL Ramp-Up Rate 3°C/s max 3°C/s max Time Maintained Above Liquidous (TL) Liquidous Temperature (TL) 183°C 217°C Time (tL) 60 s to 150 s 60 s to 150 s Peak Temperature (TP) 240°C + 0°C/−5°C 260°C + 0°C/−5°C Time within 5°C of Actual Peak Temperature (tP) 10 s to 30 s 20 s to 40 s Ramp-Down Rate 6°C/s max 6°C/s max Time 25°C to Peak Temperature 6 minutes max 8 minutes max ESD CAUTION ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on the human body and test equipment and can discharge without detection. Although this product features proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance degradation or loss of functionality. soiseek.com

soiseek com ADXL330 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS 05-0.325 035 Hn I IMENSIONS SHOWN IN MILLIMETERS Figure 3.Pin Configuration Figure4.Recommended PCBLayout Table 4.Pin Function Descriptions Pin No. Mnemonic Descriptior 3 COM mon 4 No Connect 67 mor 89 ZChannel Output 10 1213 No Connect 41516 Rev.Page5 of16

ADXL330 Rev. 0 | Page 5 of 16 PIN CONFIGURATION AND FUNCTION DESCRIPTIONS NC = NO CONNECT NC 1 ST 2 COM 3 NC 4 XOUT 12 11 NC YOUT 10 9 NC COM COM COM ZOUT 56 78 16NC 15 VS 14 VS 13NC ADXL330 TOP VIEW (Not to Scale) +Z +X +Y 05677-029 Figure 3. Pin Configuration CENTER PAD IS NOT INTERNALLY CONNECTED BUT SHOULD BE SOLDERED FOR MECHANICAL INTEGRITY 0.50 MAX 0.65 0.325 1.95 0.65 0.325 4 4 0.35 MAX 1.95 DIMENSIONS SHOWN IN MILLIMETERS 05677-032 Figure 4. Recommended PCB Layout Table 4. Pin Function Descriptions Pin No. Mnemonic Description 1 NC No Connect 2 ST Self-Test 3 COM Common 4 NC No Connect 5 COM Common 6 COM Common 7 COM Common 8 ZOUT Z Channel Output 9 NC No Connect 10 YOUT Y Channel Output 11 NC No Connect 12 XOUT X Channel Output 13 NC No Connect 14 VS Supply Voltage (2.0 V to 3.6 V) 15 VS Supply Voltage (2.0 V to 3.6 V) 16 NC No Connect soiseek.com

soiseek.com ADXL330 TYPICAL PERFORMANCE CHARACTERISTICS N1000 for all typical performance plots,unless otherwise noted. .X-Axs ZerogBiasat=3V igure &X-Axis 25℃4=21 14214161481的 1.521.541561.5 6700射1的1 Floure 6.Y-Axis Zero a Bios at 25'C.Vs=3V Figure.Y-Axis Zerog Bias at 1.421441461.48 Figure7.Z-Axs.V3V Figure 10.Z-AxisZer Vs-2V Rev.0|Page 6 of 16

ADXL330 Rev. 0 | Page 6 of 16 TYPICAL PERFORMANCE CHARACTERISTICS N > 1000 for all typical performance plots, unless otherwise noted. 35 0 5 10 15 20 25 30 1.42 1.44 1.46 1.48 1.50 1.52 1.54 1.56 1.58 % OF POPULATION OUTPUT (V) 05677-003 Figure 5. X-Axis Zero g Bias at 25°C, VS = 3 V 40 35 0 5 10 15 20 25 30 1.42 1.44 1.46 1.48 1.50 1.52 1.54 1.56 1.58 % OF POPULATION OUTPUT (V) 05677-004 Figure 6. Y-Axis Zero g Bias at 25°C, VS = 3 V 40 35 0 5 10 15 20 25 30 1.42 1.44 1.46 1.48 1.50 1.52 1.54 1.56 1.58 % OF POPULATION OUTPUT (V) 05677-005 Figure 7. Z-Axis Zero g Bias at 25°C, VS = 3 V 16 14 0 2 4 6 8 10 12 0.95 0.96 0.97 0.98 0.99 1.00 1.01 1.02 1.03 1.04 1.05 1.06 1.07 1.08 1.09 % OF POPULATION OUTPUT (V) 05677-006 Figure 8. X-Axis Zero g Bias at 25°C, VS = 2 V 16 14 0 2 4 6 8 10 12 0.95 0.96 0.97 0.98 0.99 1.00 1.01 1.02 1.03 1.04 1.05 1.06 1.07 1.08 1.09 % OF POPULATION OUTPUT (V) 05677-007 Figure 9. Y-Axis Zero g Bias at 25°C, VS = 2 V 25 0 5 10 15 20 0.88 0.90 0.92 0.94 0.96 0.98 1.00 1.02 1.04 1.06 1.08 1.10 1.12 1.14 1.16 % OF POPULATION OUTPUT (V) 05677-008 Figure 10. Z-Axis Zero g Bias at 25°C, VS = 2 V soiseek.com

soiseek com ADXL330 -20-10 00070 Fioure 11.X-Axis Figure 14.X-Axis Zero g Bias vs.Temperature-8 Parts Soldered to PCB 12 Figure 15.Y-Axi 1.46 1.45 5202.5 -20-10 5060 Figure 13.Z-Axis Zero g Bias Temperature Coefficient,Vs =3 V Figure 16.Z-Axis Zero g Bias vs.Temperature-8 Parts Soldered to PCB Rev.Page7of 16

ADXL330 Rev. 0 | Page 7 of 16 35 0 5 10 15 25 30 20 –2.5 –0.5–1.0–1.5–2.0 0 2.52.01.51.00.5 % OF POPULATION TEMPERATURE COEFFICIENT (mg/°C) 05677-009 Figure 11. X-Axis Zero g Bias Temperature Coefficient, VS = 3 V 40 35 0 5 10 15 25 30 20 –2.5 –0.5–1.0–1.5–2.0 0 2.52.01.51.00.5 % OF POPULATION TEMPERATURE COEFFICIENT (mg/°C) 05677-010 Figure 12. Y-Axis Zero g Bias Temperature Coefficient, VS = 3 V 30 0 5 10 15 25 20 –2.5 –0.5–1.0–1.5–2.0 0 2.52.01.51.00.5 % OF POPULATION TEMPERATURE COEFFICIENT (mg/°C) 05677-011 Figure 13. Z-Axis Zero g Bias Temperature Coefficient, VS = 3 V 1.55 1.54 1.53 1.52 1.51 1.50 1.49 1.48 1.47 1.46 1.45 –30 –20 –10 0 10 20 30 40 50 60 70 80 VOLTS TEMPERATURE (°C) 05677-012 N = 8 Figure 14. X-Axis Zero g Bias vs. Temperature—8 Parts Soldered to PCB 1.55 1.54 1.53 1.52 1.51 1.50 1.49 1.48 1.47 1.46 1.45 –30 –20 –10 0 10 20 30 40 50 60 70 80 VOLTS TEMPERATURE (°C) 05677-013 N = 8 Figure 15. Y-Axis Zero g Bias vs. Temperature—8 Parts Soldered to PCB 1.55 1.54 1.53 1.52 1.51 1.50 1.49 1.48 1.47 1.46 1.45 –30 –20 –10 0 10 20 30 40 50 60 70 80 VOLTS TEMPERATURE (°C) 05677-014 N = 8 Figure 16. Z-Axis Zero g Bias vs. Temperature—8 Parts Soldered to PCB soiseek.com

soiseek.com ADXL330 027026028 igure 17.X-Axis Sensitivity at 25'C.Vs-3 V igure 20.X-Axis Sensitivity at 25'C Vs-2 v 0.310520.33 igure V-Axis Sensitivity at V3V igure 21.Y-Axis S 0.260270.28 Figure 19.Z-A 25℃4=3y Figure22.Z-Ax t25℃，4=2 Rev.0[Page Bof16

ADXL330 Rev. 0 | Page 8 of 16 60 0 10 20 30 40 50 0.26 0.27 0.28 0.29 0.30 0.31 0.32 0.33 0.34 % OF POPULATION SENSITIVITY (V/g) 05677-015 Figure 17. X-Axis Sensitivity at 25°C, VS = 3 V 70 60 0 10 20 30 40 50 0.26 0.27 0.28 0.29 0.30 0.31 0.32 0.33 0.34 % OF POPULATION SENSITIVITY (V/g) 05677-016 Figure 18. Y-Axis Sensitivity at 25°C, VS = 3 V 70 60 0 10 20 30 40 50 0.25 0.26 0.27 0.28 0.29 0.30 0.31 0.32 0.33 % OF POPULATION SENSITIVITY (V/g) 05677-017 Figure 19. Z-Axis Sensitivity at 25°C, VS = 3 V 35 30 0 5 10 15 20 25 0.170 0.174 0.178 0.182 0.186 0.190 0.194 0.198 0.202 0.206 0.210 % OF POPULATION SENSITIVITY (V/g) 05677-018 Figure 20. X-Axis Sensitivity at 25°C, VS = 2 V 40 35 30 0 5 10 15 20 25 0.170 0.174 0.178 0.182 0.186 0.190 0.194 0.198 0.202 0.206 0.210 % OF POPULATION SENSITIVITY (V/g) 05677-019 Figure 21. Y-Axis Sensitivity at 25°C, VS = 2 V 40 35 30 0 5 10 15 20 25 0.172 0.176 0.180 0.184 0.188 0.192 0.196 0.200 0.204 0.208 0.212 % OF POPULATION SENSITIVITY (V/g) 05677-020 Figure 22. Z-Axis Sensitivity at 25°C, VS = 2 V soiseek.com

soiseek com ADXL330 N- 3 1.6-120804 40.8121.62.0 -20-109 50的 e 23.X-Axis Sensitivit Drift Over Temperature,Vs=3 V guweXeaioaW39Totu Q.30 20804 -20-10 re 24.Y-Axis Sensitivity Drift Over Temperature,Vs=3 V wucaco2aYYmt N-8 2720 ature.Vs-3V Rev.Page9 of16

ADXL330 Rev. 0 | Page 9 of 16 90 80 70 60 0 10 20 30 40 50 –2.0 –1.6 –1.2 –0.8 –0.4 0 0.4 0.8 1.2 1.6 2.0 % OF POPULATION DRIFT (%) 05677-021 Figure 23. X-Axis Sensitivity Drift Over Temperature, VS = 3 V 70 60 0 10 20 30 40 50 –2.0 –1.6 –1.2 –0.8 –0.4 0 0.4 0.8 1.2 1.6 2.0 % OF POPULATION DRIFT (%) 05677-022 Figure 24. Y-Axis Sensitivity Drift Over Temperature, VS = 3 V 25 20 15 10 5 0 –1.0 –0.6 –0.2 0.2 0.6 1.0 1.4 1.8 2.2 2.6 3.0 % OF POPULATION DRIFT (%) 05677-023 Figure 25. Z-Axis Sensitivity Drift Over Temperature, VS = 3 V 0.33 0.32 0.31 0.30 0.29 0.28 0.27 –30 –10–20 0 302010 40 80706050 SENSITIVITY (V/g) TEMPERATURE (°C) 05677-024 N = 8 Figure 26. X-Axis Sensitivity vs. Temperature 8 Parts Soldered to PCB, VS = 3 V 0.33 0.32 0.31 0.30 0.29 0.28 0.27 –30 –10–20 0 302010 40 80706050 SENSITIVITY (V/g) TEMPERATURE (°C) 05677-025 N = 8 Figure 27. Y-Axis Sensitivity vs. Temperature 8 Parts Soldered to PCB, VS = 3 V 0.33 0.32 0.31 0.30 0.29 0.28 0.27 –30 –10–20 0 302010 40 80706050 SENSITIVITY (V/g) TEMPERATURE (°C) 05677-026 N = 8 Figure 28. Z-Axis Sensitivity vs. Temperature 8 Parts Soldered to PCB, VS = 3 V soiseek.com