北京科技大学材料科学学院：《薄膜材料与纳米技术 Thin Film Materials & Nanotechnology》第一讲 引言、薄膜技术的真空技术基础 Fundamentals of vacuum technology in thin films techniques

薄膜材料与纳米技术 Thin Film Materials Nanotechnology 北京科技大学材料科学学院唐伟忠 62332475 E-mai wztang@mater.ustb.edu.cn 课件下载网址:wztangteaching(@sina.com 下载密码 123456

薄膜材料与纳米技术 Thin Film Materials & Nanotechnology 北京科技大学材料科学学院 唐伟忠 Tel: 6233 2475 E-mail: wztang@mater.ustb.edu.cn 课件下载网址： wztang_teaching@sina.com 下 载 密 码： 123456

◆薄膜材料 ◆薄膜材料的应用 ◆薄膜技术所硏究的内容 ◆薄膜材料与纳米技术

引 言 ◆ 薄膜材料 ◆ 薄膜材料的应用 ◆ 薄膜技术所研究的内容 ◆ 薄膜材料与纳米技术

Have you ever? used a personal computer? used a CD player? used a touching screen in an ATM? used a pair of glasses? Have you realized that without thin film technology, there modern civilizations e would be no

• used a personal computer? • used a CD player? • used a touching screen in an ATM? • used a pair of glasses? Have you realized that without thin film technology, there would be no modern civilization? Have you ever?

Worldwide market of raw materials for thin film technology 10.000 9,000 00 7000 6000 日5,000 4.000 3.000 2000 1.000 0 2002 2003 2004 2009 口 Physical processes■ Chemical processes a The market has been estimated at S7. 1 billion in 2004 and was projected as $13.5 billion by 2009 a it rises at average annual growth rate of 13.7

Worldwide market of raw materials for thin film technology  The market has been estimated at $7.1 billion in 2004 and was projected as $13.5 billion by 2009.  it rises at average annual growth rate of 13.7%

簿膜材料的定义 利用特殊的技术手段,人为制得的、其一维 尺度显著小于另外两维尺度的、具有特定 性能与用途的材料. a thin film is a layer of material with a high surface to-volume ratio It is a very thin coating applied to things that we use everyday. Thin Films can be made of many different materials and can be applied to almost any surface It is an important and exciting branch of material science

薄膜材料的定义 利用特殊的技术手段, 人为制得的、其一维 尺度显著小于另外两维尺度的、具有特定 性能与用途的材料. ◆ A thin film is a layer of material with a high surface￾to-volume ratio. ◆ It is a very thin coating applied to things that we use everyday. ◆ Thin Films can be made of many different materials and can be applied to almost any surface. ◆ It is an important and exciting branch of material science

薄膜材料的特点 般并不是单独存在的 结合了不同材料的不同特性 种类繁 需要使用特殊的制备与研究方法

薄膜材料的特点 ◼ 一般并不是单独存在的 ◼ 结合了不同材料的不同特性 ◼ 种类繁多 ◼ 需要使用特殊的制备与研究方法

为什么要发展薄膜材料 三个理由 不同材料特性的优势互补 ◆微电子技术、光电子技术的发展 ◆功能性结构的微小型化

为什么要发展薄膜材料 三个理由： ◆ 不同材料特性的优势互补 ◆ 微电子技术、光电子技术的发展 ◆ 功能性结构的微小型化

薄膜材料的应用 耐磨、防腐与装饰涂层 光学涂层 光电薄膜 微电子技术 磁存储技术 微机电系统

薄膜材料的应用 ◼ 耐磨、防腐与装饰涂层 ◼ 光学涂层 ◼ 光电薄膜 ◼ 微电子技术 ◼ 磁存储技术 ◼ 微机电系统 ……

耐磨、防腐与裝饰涂层 gee

耐磨、防腐与装饰涂层

光学涂层材料

光学涂层材料